Length distribution of aluminum etch tunnels

A model was derived for the length distribution of aluminum etch tunnels, based on an assumed constant death rate per unit length. Both active and dead tunnels were accounted. The model gives reasonable fits to measured tunnel length distribution data with two adjustable parameters, the death rate p...

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Bibliographic Details
Published inJournal of applied electrochemistry Vol. 19; no. 1; pp. 69 - 75
Main Authors BECK, T. R, UCHI, H, HEBERT, K. R
Format Journal Article
LanguageEnglish
Published Heidelberg Springer 1989
Subjects
Chemistry
Electrochemistry
Exact sciences and technology
General and physical chemistry
Theoretical study
Temperature
Etching
Acidic solution
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Summary:A model was derived for the length distribution of aluminum etch tunnels, based on an assumed constant death rate per unit length. Both active and dead tunnels were accounted. The model gives reasonable fits to measured tunnel length distribution data with two adjustable parameters, the death rate per unit length and the number of active tunnels. The death rate parameter has a value of about 2% of tunnels dying per mu m of growth length for the set of experimental data. The numbers of active and dead tunnels appear to be consistent with other tunnel measurements.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0021-891X
1572-8838
DOI:10.1007/bf01039392