Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration
We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing...
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| Published in | Lab on a chip Vol. 13; no. 8; pp. 1626 - 1631 |
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| Main Authors | , , , , , , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
England
01.01.2013
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| Subjects | |
| Online Access | Get full text |
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| Abstract | We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications. |
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| AbstractList | We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications. We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications. |
| Author | Shen, Yinglong Song, Jiangxin Xu, Zhizhan Liao, Yang Fan, Zhichao Midorikawa, Katsumi Cheng, Ya Wei, Xunbin Chen, Danping Sugioka, Koji Liu, Changning He, Fei |
| Author_xml | – sequence: 1 givenname: Yang surname: Liao fullname: Liao, Yang – sequence: 2 givenname: Ya surname: Cheng fullname: Cheng, Ya – sequence: 3 givenname: Changning surname: Liu fullname: Liu, Changning – sequence: 4 givenname: Jiangxin surname: Song fullname: Song, Jiangxin – sequence: 5 givenname: Fei surname: He fullname: He, Fei – sequence: 6 givenname: Yinglong surname: Shen fullname: Shen, Yinglong – sequence: 7 givenname: Danping surname: Chen fullname: Chen, Danping – sequence: 8 givenname: Zhizhan surname: Xu fullname: Xu, Zhizhan – sequence: 9 givenname: Zhichao surname: Fan fullname: Fan, Zhichao – sequence: 10 givenname: Xunbin surname: Wei fullname: Wei, Xunbin – sequence: 11 givenname: Koji surname: Sugioka fullname: Sugioka, Koji – sequence: 12 givenname: Katsumi surname: Midorikawa fullname: Midorikawa, Katsumi |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/23463190$$D View this record in MEDLINE/PubMed |
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| Snippet | We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional... |
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| SubjectTerms | Channels Deoxyribonucleic acid Direct laser writing DNA - analysis Fluorescent Dyes - chemistry Glass Glass - chemistry Lasers Microfluidic Analytical Techniques - instrumentation Microfluidic Analytical Techniques - methods Nanocomposites Nanofluids Nanomaterials Nanostructure Nanostructures - chemistry Nanotechnology - instrumentation Nanotechnology - methods Porosity Silicates - chemistry Three dimensional |
| Title | Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration |
| URI | https://www.ncbi.nlm.nih.gov/pubmed/23463190 https://www.proquest.com/docview/1318097243 https://www.proquest.com/docview/1349434341 |
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