Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

• Published in: Lab on a chip Vol. 13; no. 8; pp. 1626 - 1631
• Main Authors: Liao, Yang, Cheng, Ya, Liu, Changning, Song, Jiangxin, He, Fei, Shen, Yinglong, Chen, Danping, Xu, Zhizhan, Fan, Zhichao, Wei, Xunbin, Sugioka, Koji, Midorikawa, Katsumi
• Format: Journal Article
• Language: English
• Published: England 01.01.2013
• Subjects: Channels; Deoxyribonucleic acid; Direct laser writing; DNA - analysis; Fluorescent Dyes - chemistry; Glass; Glass - chemistry; Lasers; Microfluidic Analytical Techniques - instrumentation; Microfluidic Analytical Techniques - methods; Nanocomposites; Nanofluids; Nanomaterials; Nanostructure; Nanostructures - chemistry; Nanotechnology - instrumentation; Nanotechnology - methods; Porosity; Silicates - chemistry; Three dimensional
• ISSN: 1473-0197; 1473-0189; 1473-0189
• DOI: 10.1039/c3lc41171k

We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.