Elaboration and Test of High Energy Density Magnetic Micro-Actuators for Tactile Display Applications

This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing sensations to the skin in Human-Computer Interactions. The magnetic micro-actua...

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Bibliographic Details
Published inProcedia chemistry Vol. 1; no. 1; pp. 694 - 697
Main Authors Streque, J., Talbi, A., Viard, R., Pernod, P., Preobrazhensky, V.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.09.2009
Subjects
Magnetic actuation
Magnetism
MEMS
Micro-actuators
Microsystems
Tactile display
Microsystems
Tactile display
Micro-actuators
MEMS
Magnetism
Magnetic actuation
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Summary:This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing sensations to the skin in Human-Computer Interactions. The magnetic micro-actuators include an elastomeric PDMS diaphragm that holds a samarium-cobalt micro-magnet and a miniature Copper coil. The device was first optimized using finite element analysis for different coil-magnet configurations. Magnetic micro-actuators were micro-fabricated and their performances were experimentally evaluated. Each micro-actuator provides forces around 4mN for 800mA RMS driving currents (power dissipation about 100mW).
ISSN:1876-6196
1876-6196
DOI:10.1016/j.proche.2009.07.173