Fabrication of terahertz metamaterials by laser printing

A laser printing technique was used to fabricate split-ring resonators (SRRs) on Si substrates for terahertz (THz) metamaterials and their resonance behavior evaluated by THz time-domain spectroscopy. The laser-printed Ag SRRs exhibited sharp edge definition and excellent thickness uniformity, which...

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Bibliographic Details
Published inOptics letters Vol. 35; no. 23; p. 4039
Main Authors Kim, Heungsoo, Melinger, Joseph S, Khachatrian, Ani, Charipar, Nicholas A, Auyeung, Raymond C Y, Piqué, Alberto
Format Journal Article
LanguageEnglish
Published United States 01.12.2010
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Summary:A laser printing technique was used to fabricate split-ring resonators (SRRs) on Si substrates for terahertz (THz) metamaterials and their resonance behavior evaluated by THz time-domain spectroscopy. The laser-printed Ag SRRs exhibited sharp edge definition and excellent thickness uniformity, which resulted in an electromagnetic response similar to that from identical Au SRR structures prepared by conventional photolithography. These results demonstrate that laser printing is a practical alternative to conventional photolithography for fabricating metamaterial structures at terahertz frequencies, since it allows their design to be easily modified and optimized.
ISSN:1539-4794
DOI:10.1364/ol.35.004039