CMOS-foundry-based blue and violet photonics

We demonstrate a CMOS-foundry-based S i 3 N 4 photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and < 1 d B / c m waveguide propagation loss of around 405 nm.

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Bibliographic Details
Published inOptica Vol. 8; no. 5; p. 755
Main Authors Morin, Theodore J., Chang, Lin, Jin, Warren, Li, Chenlei, Guo, Joel, Park, Hyundai, Tran, Minh A., Komljenovic, Tin, Bowers, John E.
Format Journal Article
LanguageEnglish
Published 20.05.2021
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Summary:We demonstrate a CMOS-foundry-based S i 3 N 4 photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and < 1 d B / c m waveguide propagation loss of around 405 nm.
ISSN:2334-2536
2334-2536
DOI:10.1364/OPTICA.426065