Ultrapure arsenic and its compounds for optical and semiconductor materials
The article contains a survey of methods of deep purification of elemental arsenic and its compounds used in technology of optical, optoelectronic, and semiconductor materials. Severe requirements on permissible impurity content (ppb level) and features of structure and properties of these substance...
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| Published in | Inorganic materials Vol. 52; no. 13; pp. 1339 - 1357 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Moscow
Pleiades Publishing
01.12.2016
Springer Nature B.V |
| Subjects | |
| Online Access | Get full text |
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| Abstract | The article contains a survey of methods of deep purification of elemental arsenic and its compounds used in technology of optical, optoelectronic, and semiconductor materials. Severe requirements on permissible impurity content (ppb level) and features of structure and properties of these substances make the process of their production in the state of high purity unescapably multistage. The physics and chemistry and factors determining efficiency of the developed processing routes and the attained purity level for the arsenic, its oxide, chloride, hydride, and sulfides are described in this paper. |
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| AbstractList | The article contains a survey of methods of deep purification of elemental arsenic and its compounds used in technology of optical, optoelectronic, and semiconductor materials. Severe requirements on permissible impurity content (ppb level) and features of structure and properties of these substances make the process of their production in the state of high purity unescapably multistage. The physics and chemistry and factors determining efficiency of the developed processing routes and the attained purity level for the arsenic, its oxide, chloride, hydride, and sulfides are described in this paper. |
| Author | Fedorov, V. A. Churbanov, M. F. |
| Author_xml | – sequence: 1 givenname: V. A. surname: Fedorov fullname: Fedorov, V. A. email: fedorov@igic.ras.ru organization: Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences – sequence: 2 givenname: M. F. surname: Churbanov fullname: Churbanov, M. F. organization: Devyatykh Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences |
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| Cites_doi | 10.1134/S0020168509130019 10.1023/A:1019791114256 10.1023/A:1021831017530 10.1023/A:1021878900691 10.1134/S0020168509090015 10.1134/S0020168508090094 10.1023/A:1012370808738 |
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| Copyright | Pleiades Publishing, Ltd. 2016 Copyright Springer Science & Business Media 2016 |
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| SubjectTerms | Arsenic Arsenic compounds Chemistry Chemistry and Materials Science Chlorides Efficiency Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science Optoelectronics Oxides Purification Purity Semiconductor materials Sulfides |
| Title | Ultrapure arsenic and its compounds for optical and semiconductor materials |
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