Magnetoresistance and surface properties with deposition condition for La-Sr-Mn-O thin films

• Published in: Physica Status Solidi (b) Vol. 241; no. 7; pp. 1561 - 1564
• Main Authors: Ahn, Geun Young, Park, Seung-Iel, Shim, In-Bo, Cho, Young Suk, Kim, Chul Sung
• Format: Journal Article
• Language: English
• Published: Berlin WILEY-VCH Verlag 01.06.2004; WILEY‐VCH Verlag; Wiley
• Subjects: 75.47.−m; 81.15.Cd; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Exact sciences and technology; Magnetic properties and materials; Physics; Lanthanum oxides; RBS; Annealing; Polycrystals; Perovskites; XRD; Low field; Thin films; Cathode sputtering; Partial pressure; Surface properties; Chemical composition; Silicon; Magnetoresistance; Microstructure; Radiofrequency sputtering; Magnetic properties; Crystal structure
• ISSN: 0370-1972; 1521-3951
• DOI: 10.1002/pssb.200304673

Polycrystalline La–Sr–Mn–O thin films were grown through RF magnetron sputtering on Si(100) substrates. The conditions for the deposition of the La–Sr–Mn–O thin films were 0, 20, 40, 60 and 80% partial oxygen pressures of the buffer gas, an RF magnetron sputtering power of 2.46 W/cm2 and a substrate temperature of room temperature. After the deposition, all the films were annealed in the air for 3 hours at 800 °C. The crystal structure, the chemical composition, the microstructure, the magnetic properties and the low‐field magnetoresistance of the La–Sr–Mn–O films were studied using X‐ray diffraction, Rutherford back‐scattering spectroscopy, atomic force microscopy, and a vibrating sample magnetometer. The crystal structure of the LSMO thin films was found to be a pseudo‐cubic perovskite. As the partial oxygen pressure increased, particle size and root mean square roughness decreased while saturation magnetization and the low‐field magnetoresistance increased. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)