Improved Differential Evolution Based on Stochastic Ranking for Robust Layout Synthesis of MEMS Components

• Published in: IEEE transactions on industrial electronics (1982) Vol. 56; no. 4; pp. 937 - 948
• Main Authors: Zhun Fan, Jinchao Liu, Sorensen, T., Pan Wang
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2009; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Algorithms; Design engineering; Differential evolution (DE); Engineering management; Evolution; Fabrication; Microcavities; Microelectromechanical systems; microelectromechanical systems (MEMS); Micromechanical devices; Optical resonators; Optical sensors; Optimization; robust design; Robustness; Stochastic processes; stochastic ranking (SR); Stochastic systems; Synthesis; Uncertainty
• ISSN: 0278-0046; 1557-9948
• DOI: 10.1109/TIE.2008.2006935

This paper introduces an improved differential evolution (DE) algorithm for robust layout synthesis of microelectromechanical system components subject to inherent geometric uncertainties. A case study of the layout synthesis of a comb-driven microresonator shows that the approach proposed in this p...