Improved Differential Evolution Based on Stochastic Ranking for Robust Layout Synthesis of MEMS Components

• Published in: IEEE transactions on industrial electronics (1982) Vol. 56; no. 4; pp. 937 - 948
• Main Authors: Zhun Fan, Jinchao Liu, Sorensen, T., Pan Wang
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2009; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Algorithms; Design engineering; Differential evolution (DE); Engineering management; Evolution; Fabrication; Microcavities; Microelectromechanical systems; microelectromechanical systems (MEMS); Micromechanical devices; Optical resonators; Optical sensors; Optimization; robust design; Robustness; Stochastic processes; stochastic ranking (SR); Stochastic systems; Synthesis; Uncertainty
• ISSN: 0278-0046; 1557-9948
• DOI: 10.1109/TIE.2008.2006935

This paper introduces an improved differential evolution (DE) algorithm for robust layout synthesis of microelectromechanical system components subject to inherent geometric uncertainties. A case study of the layout synthesis of a comb-driven microresonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than the typical designs. It is also demonstrated that the algorithm proposed in this paper cannot only obtain better results than the standard DE algorithm but also outperform some other state-of-the-art algorithms in constrained optimization.