Characterisation of sol-gel PZT films on Pt-coated substrates

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 5; no. 2; pp. 153 - 155
Main Authors Gardeniers, J G E, Smith, A, Cobianu, C
Format Journal Article Conference Proceeding
LanguageEnglish
Published Bristol IOP Publishing 01.06.1995
Institute of Physics
Subjects
Biological and medical sciences
Biotechnology
Fundamental and applied biological sciences. Psychology
Methods. Procedures. Technologies
Others
Various methods and equipments
Characterization
Soils
Perovskite type compound
Electrical properties
Film
Platinum
Optical properties
Crystallization
Freeze
Coated material
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/5/2/025