Formation of a new phase in Ru films by sputtering based on band calculation prediction

The formation of the metastable Ru films sputtered onto a glass substrate and single crystals with different lattice constants was studied. X-ray diffraction(XRD) and electron beam diffraction(EBD) analyses revealed a new phase that grew on Mo single crystal, which appears to be a single-crystal-lik...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 36; no. 12A; pp. 7360 - 7361
Main Authors SHIIKI, K, HIO, O
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 1997
Subjects
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Metals. Metallurgy
Physics
Structure and morphology; thickness
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
Hexagonal lattices
Ruthenium
Electron diffraction
Transition elements
Band theory
XRD
Experimental study
Substrates
Crystal structure
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Summary:The formation of the metastable Ru films sputtered onto a glass substrate and single crystals with different lattice constants was studied. X-ray diffraction(XRD) and electron beam diffraction(EBD) analyses revealed a new phase that grew on Mo single crystal, which appears to be a single-crystal-like body centered tetragonal structure, although the equilibrium phase is hexagonal close-packed structure. Such phase formation is reasonable considering the total energy calculated by band calculation.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.36.7360