Series-resonant VHF micromechanical resonator reference oscillators
Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a custom-designed single-stage zero-phase-shift sustaining amplifier together with planar-processed micromechanical resonator variants with quality factors Q in the thousands that differ mainly in their power-hand...
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Published in | IEEE journal of solid-state circuits Vol. 39; no. 12; pp. 2477 - 2491 |
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Main Authors | , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
New York, NY
IEEE
01.12.2004
Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a custom-designed single-stage zero-phase-shift sustaining amplifier together with planar-processed micromechanical resonator variants with quality factors Q in the thousands that differ mainly in their power-handling capacities. The resonator variants include two 40-/spl mu/m-long 10-MHz clamped-clamped-beam (CC-beam) resonators, one of them much wider than the other so as to allow larger power-handling capacity, and a 64-/spl mu/m-diameter 60-MHz disk resonator that maximizes both Q and power handling among the resonators tested. Tradeoffs between Q and power handling are seen to be most important in setting the close-to-carrier and far-from-carrier phase noise behavior of each oscillator, although such parameters as resonant frequency and motional resistance are also important. With a 10/spl times/ higher power handling capability than the wide-width CC-beam resonator, a comparable series motional resistance, and a 45/spl times/ higher Q of 48 000, the 60-MHz wine glass resonator reference oscillator exhibits a measured phase noise of -110 dBc/Hz at 1-kHz offset, and -132 dBc/Hz at far-from-carrier offsets. Dividing down to 10 MHz for fair comparison with a common conventional standard, this oscillator achieves a phase noise of -125 dBc/Hz at 1-kHz offset, and -147 dBc/Hz at far-from-carrier offsets. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 ObjectType-Article-2 ObjectType-Feature-1 |
ISSN: | 0018-9200 1558-173X |
DOI: | 10.1109/JSSC.2004.837086 |