Target block alignment error in XY stage metrology

This paper discusses a fundamental question in the characterization of XY stages: Is the orthogonality error of the stage distinguishable from a target block alignment error without explicitly measuring the target block misalignment? The conclusion reached here is that, for parallel kinematic stages...

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Bibliographic Details
Published inPrecision engineering Vol. 31; no. 3; pp. 185 - 187
Main Authors Awtar, Shorya, Slocum, Alexander H.
Format Journal Article
LanguageEnglish
Published New York, NY Elsevier Inc 01.07.2007
Elsevier Science
Subjects
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Metrology errors
Precision engineering, watch making
Target block alignment
XY stage
XY stage
Metrology errors
Target block alignment
Alignment
Precision engineering
Parallel mechanism
Metrology
Alignment defect
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Summary:This paper discusses a fundamental question in the characterization of XY stages: Is the orthogonality error of the stage distinguishable from a target block alignment error without explicitly measuring the target block misalignment? The conclusion reached here is that, for parallel kinematic stages this is not possible using any metrology setup or any number of measurements.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0141-6359
1873-2372
DOI:10.1016/j.precisioneng.2006.06.002