AeroMEMS Wall Hot-Wire Anemometer on Polyimide Substrate Featuring Top Side or Bottom Side Bondpads
Design, manufacturing, calibration, and basic characterization of a microelectromechanical systems (MEMS) wall hot wire sensor on a flexible polyimide substrate are presented. A configuration exhibiting bond pads on the top side of the foil, as well as an improved setup featuring a through-foil meta...
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Published in | IEEE sensors journal Vol. 7; no. 8; pp. 1095 - 1101 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.08.2007
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | Design, manufacturing, calibration, and basic characterization of a microelectromechanical systems (MEMS) wall hot wire sensor on a flexible polyimide substrate are presented. A configuration exhibiting bond pads on the top side of the foil, as well as an improved setup featuring a through-foil metallization and bottom side bond pads were established. Both sensor designs make use of a highly sensitive nickel thin-film resistor spanning a reactive ion etched cavity in a polyimide substrate. The polyimide base material enables the sensor to be adapted to curved aerodynamic surfaces, e.g., airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low-power consumption (<25 mW). Fluctuations in wall shear stress up to 85 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.166 V/(N/m 2 ) is achieved in a wall shear stress range from 0 to 0.72 N/m 2 . The specifically designed through-foil metallization process allows for electrical contacts to be positioned on the backside of the substrate, thus effectively minimizing aerodynamic disturbances. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1530-437X 1558-1748 |
DOI: | 10.1109/JSEN.2007.897933 |