Preferential sputtering of oxides: A comparison of model predictions with experimental data

Experimental data on the composition of the altered layer of some oxides bombarded with noble gas ions are compared with different model predictions based on Sigmund's sputtering theory. It is shown that although the difference in mass of the metal atoms is the dominant factor in the preferenti...

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Bibliographic Details
Published inApplied surface science Vol. 27; no. 3; pp. 355 - 365
Main Authors Malherbe, J.B., Hofmann, S., Sanz, J.M.
Format Journal Article
LanguageEnglish
Published Amsterdam Elsevier B.V 01.12.1986
Elsevier Science
Subjects
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electron and ion emission by liquids and solids; impact phenomena
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Other electron-impact emission phenomena
Physics
Transition metal Compounds
Beryllium Oxides
Theoretical study
Ions
Sputtering
Inorganic compound
Aluminium Oxides
Transition metal Oxides
Gallium Oxides
Binding energy
Tin Oxides
Noble gas Atomic ions
Silicon Oxides
Models
Magnesium Oxides
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Summary:Experimental data on the composition of the altered layer of some oxides bombarded with noble gas ions are compared with different model predictions based on Sigmund's sputtering theory. It is shown that although the difference in mass of the metal atoms is the dominant factor in the preferential sputtering of oxygen, the additional consideration of the surface binding energies yields an improved agreement between theory and experiment.
ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(86)90139-X