The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance

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Bibliographic Details
Published inIEEE sensors journal Vol. 1; no. 2; pp. 98 - 108
Main Authors Creemer, J.F., Fruett, F., Meijer, G.C.M., French, P.J.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.08.2001
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Biosensors
Circuits
Laboratories
Materials science and technology
Mechanical sensors
Piezoresistance
Sensor phenomena and characterization
Silicon
Strain measurement
Stress
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Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2001.936927