A micromachined silicon-based probe for a scanning near-field optical microscope on-chip

The novel concept of an integrated scanning near-field optical microscope on-chip (SOMOC) has been presented. SOMOC consists of a micromachined cantilever probe and an emission-detection device realized by the use of a vertical-cavity surface-emitting laser (VCSEL). The construction and the first te...

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Bibliographic Details
Published inMeasurement science & technology Vol. 17; no. 1; pp. 32 - 37
Main Authors Bargiel, Sylwester, Heinis, Dominique, Gorecki, Christophe, Górecka-Drzazga, Anna, Dziuban, Jan A, Józwik, Michał
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.01.2006
Subjects
Engineering Sciences
Optics
Photonic
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Summary:The novel concept of an integrated scanning near-field optical microscope on-chip (SOMOC) has been presented. SOMOC consists of a micromachined cantilever probe and an emission-detection device realized by the use of a vertical-cavity surface-emitting laser (VCSEL). The construction and the first technological results of the silicon probe with a light transparent Si02 tip have been described. The basic mechanical properties of the probe have been determined by stroboscopic interferometry.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/17/1/007