Replication of Fluorinated Polyimide Film Using Quartz Glass Mold

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 41; no. Part 2, No. 10A; pp. L1126 - L1129
Main Author Shioda, Tsuyoshi
Format Journal Article
LanguageEnglish
Published 01.10.2002
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ISSN:0021-4922
DOI:10.1143/JJAP.41.L1126