Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

• Published in: Sensors and actuators. A, Physical Vol. 92; no. 1; pp. 168 - 174
• Main Authors: Beeby, S.P., Grabham, N.J., White, N.M.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 01.08.2001; Elsevier Science
• Subjects: Accelerometer; Applied sciences; Electronics; Exact sciences and technology; Lithography, masks and pattern transfer; Measurements common to several branches of physics and astronomy; Mechanical engineering. Machine design; Metrology, measurements and laboratory procedures; Microelectronic fabrication (materials and surfaces technology); Physics; Precision engineering, watch making; PZT; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Thick-film; Velocity, acceleration and rotation; Accelerometer; PZT; Thick-film; Accelerometers; Thick film devices; Manufacturing processes; Piezoelectric materials; Microprocessors; Printed circuits; Silicon; Experimental study; Deflection(deformation); Strain sensors
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(01)00559-3

This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self-validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self-validation procedure is performed at resonance and therefore, a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst, this approach is certainly feasible, its implementation can be simplified by reducing the cross-talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.