Properties of Semipolar GaN Grown on a Si(100) Substrate
Semipolar GaN layers synthesized on a nanostructured Si(100) substrate are studied. It is shown that using a Si(100) nanoprofile combined with Si x N y nanostrips on top of nanostructures can yield, via metal-organic chemical-vapor deposition, GaN(10 2) layers. An additional SiC buffer layer makes i...
Saved in:
Published in | Semiconductors (Woodbury, N.Y.) Vol. 53; no. 7; pp. 989 - 992 |
---|---|
Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.07.2019
Springer Springer Nature B.V |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Semipolar GaN layers synthesized on a nanostructured Si(100) substrate are studied. It is shown that using a Si(100) nanoprofile combined with Si
x
N
y
nanostrips on top of nanostructures can yield, via metal-organic chemical-vapor deposition, GaN(10
2) layers. An additional SiC buffer layer makes it possible to obtain GaN(10
1) layers with a full-width at half-maximum of the diffraction-curve of ω
θ
≈ 35′ arcmin. It is found that the luminescence properties of the semipolar layers are mostly due to basal plane stacking faults BSF
S
-I
1
, in contrast to polar layers in which these properties are mostly due to the recombination of excitons. |
---|---|
ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782619070054 |