Effect of self-organization, defects, impurities, and autocatalytic processes on the parameters of ZnO films and nanorods

The effects of the parameters of ZnO-film deposition onto different substrates using the method of ac magnetron sputtering in a gas mixture of argon and oxygen hare studied. The phenomenon of self-organization is observed, which leads to invariability of the surface morphology of the ZnO films upon...

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Bibliographic Details
Published inSemiconductors (Woodbury, N.Y.) Vol. 49; no. 11; pp. 1473 - 1482
Main Authors Mezdrogina, M. M., Eremenko, M. V., Levitskii, V. S., Petrov, V. N., Terukov, E. I., Kaidashev, E. M., Langusov, N. V.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.11.2015
Springer
Subjects
ARGON
CONCENTRATION RATIO
CRYSTALS
DEPOSITION
DOPED MATERIALS
EMISSION SPECTRA
IMPURITIES
Low-Dimensional Systems
Magnetic Materials
Magnetism
MAGNETIZATION
MATERIALS SCIENCE
MORPHOLOGY
NANOSTRUCTURES
OPTOELECTRONIC DEVICES
PHOTOLUMINESCENCE
Physics
Physics and Astronomy
Quantum Phenomena
RARE EARTHS
Semiconductor Structures
SPUTTERING
SUBSTRATES
SURFACES
Zinc oxide
ZINC OXIDES
Magnetron Sputtering
Emission Intensity
Broaden Emission Band
Excitation Density
Hydrothermal Growth
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Summary:The effects of the parameters of ZnO-film deposition onto different substrates using the method of ac magnetron sputtering in a gas mixture of argon and oxygen hare studied. The phenomenon of self-organization is observed, which leads to invariability of the surface morphology of the ZnO films upon a variation in the substrate materials and deposition parameters. The parameters of the macro- and micro-photoluminescence spectra of the films differ insignificantly from the parameters of the photoluminescence spectra of bulk ZnO crystals obtained by the method of hydrothermal growth. The presence of intense emission with a narrow full-width at half-maximum (FWHM) in different regions of the spectrum allows ZnO films obtained by magnetron sputtering doped with rare-earth metal impurities (REIs) to be considered as a promising material for the creation of optoelectronic devices working in a broad spectral range. The possibility of the implementation of magnetic ordering upon legierung with REIs significantly broadens the functional possibilities of ZnO films. The parameters of the photoluminescence spectra of ZnO nanorods are determined by their geometrical parameters and by the concentration and type of the impurities introduced.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782615110159