Electrical Activity of Extended Defects in Multicrystalline Silicon

The excess carrier lifetime (τ) distribution in multicrystalline silicon grown by the Bridgman technique from high-purity metallurgical silicon (HPMG-Si) is studied. The features of the variation in τ, caused by the grain-boundary structure of ingots, are revealed. The grain boundaries, dislocations...

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Published inSemiconductors (Woodbury, N.Y.) Vol. 52; no. 2; pp. 254 - 259
Main Authors Pescherova, S. M., Yakimov, E. B., Nepomnyashchikh, A. I., Pavlova, L. A., Feklisova, O. V., Presnyakov, R. V.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.02.2018
Springer
Springer Nature B.V
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Summary:The excess carrier lifetime (τ) distribution in multicrystalline silicon grown by the Bridgman technique from high-purity metallurgical silicon (HPMG-Si) is studied. The features of the variation in τ, caused by the grain-boundary structure of ingots, are revealed. The grain boundaries, dislocations, and impurity microinclusions are studied by electron probe microanalysis (EPMA) and scanning electron microscopy (SEM) using selective acid etching. The electrical activity of extended defects is measured by the electronbeam- induced-current (EBIC) method.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782618020124