Electrical Activity of Extended Defects in Multicrystalline Silicon
The excess carrier lifetime (τ) distribution in multicrystalline silicon grown by the Bridgman technique from high-purity metallurgical silicon (HPMG-Si) is studied. The features of the variation in τ, caused by the grain-boundary structure of ingots, are revealed. The grain boundaries, dislocations...
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Published in | Semiconductors (Woodbury, N.Y.) Vol. 52; no. 2; pp. 254 - 259 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.02.2018
Springer Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | The excess carrier lifetime (τ) distribution in multicrystalline silicon grown by the Bridgman technique from high-purity metallurgical silicon (HPMG-Si) is studied. The features of the variation in τ, caused by the grain-boundary structure of ingots, are revealed. The grain boundaries, dislocations, and impurity microinclusions are studied by electron probe microanalysis (EPMA) and scanning electron microscopy (SEM) using selective acid etching. The electrical activity of extended defects is measured by the electronbeam- induced-current (EBIC) method. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782618020124 |