Reliability modeling of capacitive RF MEMS

• Published in: IEEE transactions on microwave theory and techniques Vol. 53; no. 11; pp. 3482 - 3488
• Main Authors: Melle, S., De Conto, D., Dubuc, D., Grenier, K., Vendier, O., Muraro, J.-L., Cazaux, J.-L., Plana, R.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.11.2005; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Bridge circuits; Charging; Circuit properties; Dielectric charging; Dielectrics; Electric potential; Electric, optical and optoelectronic circuits; Electronic circuits; Electronics; Exact sciences and technology; figure-of-merit (FOM); Frenkel-Poole conduction; Kinetic theory; Mathematical models; Micro- and nanoelectromechanical devices (mems/nems); Microelectromechanical systems; Microwaves; Monitoring; Radio frequencies; Radio frequency; Radiofrequency microelectromechanical systems; reliability; RF microelectromechanical systems (RF MEMS); Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Space technology; Switches; Switching, multiplexing, switched capacity circuits; Testing; Voltage; Frenkel-Poole conduction; Durability; RF microelectromechanical systems (RF MEMS); RF systems; Modeling; Selector switch; Poole Frenkel effect; Reliability; flgure-of-merit (FOM); Microelectromechanical device; Figure of merit; Dielectric charging; Stress measurement
• ISSN: 0018-9480; 1557-9670
• DOI: 10.1109/TMTT.2005.857109

The kinetic of dielectric charging in capacitive RF microelectromechanical systems (RF MEMS) is investigated using an original method of stress and monitoring. This effect is investigated through a new parameter: the shift rate of the actuation voltages. We demonstrate that this lifetime parameter has to be considered as a function of the applied voltage normalized by the contact quality between the bridge and the dielectric. We also demonstrate that this phenomenon is related to Frenkel-Poole conduction, which takes place into the dielectric. We finally propose a model that describes the dielectric charging kinetic in capacitive RF MEMS. This model is used to extract a figure-of-merit of capacitive switches lifetime.