Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics

We have developed a device for the fabrication of optical surfaces on the basis of plasma chemical vaporization machining (CVM). In this device, radio-frequency plasma generated at the tip of a pipelike electrode under about one atmosphere moves over a workpiece surface in a computer-controlled envi...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 37; no. 7B; p. L894
Main Authors Takino, Hideo, Shibata, Norio, Itoh, Hiroshi, Kobayashi, Teruki, Tanaka, Hiroaki, Ebi, Masami, Yamamura, Kazuya, Sano, Yasuhisa, Mori, Yuzo
Format Journal Article
LanguageEnglish
Published 15.07.1998
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Summary:We have developed a device for the fabrication of optical surfaces on the basis of plasma chemical vaporization machining (CVM). In this device, radio-frequency plasma generated at the tip of a pipelike electrode under about one atmosphere moves over a workpiece surface in a computer-controlled environment to remove a target area. A workpiece of silica glass was shaped to investigate the removal characteristics of the new device. The findings show that the new device allows high-precision fabrication from the nm to the µm level. The shaped surface is sufficiently smooth for optical use.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.37.L894