Formation of a frozen nitrogen target and characterization for the application of pulsed laser deposition

• Published in: Japanese Journal of Applied Physics Vol. 36; no. 2; pp. 798 - 804
• Main Authors: HIROSHIMA, Y, ISHIGURO, T, ESAKI, K
• Format: Journal Article
• Language: English
• Published: Tokyo Japanese journal of applied physics 1997
• Subjects: Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Laser deposition; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Inorganic compounds; Transition element compounds; Binary compounds; Mass spectroscopy; Targets; Crystal growth from vapors; Nitrogen; Experimental study; Molecular dissociation; Thin films; Multiphoton excitation; Frozen product; Excimer lasers; Laser ablation technique; Niobium nitrides
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/jjap.36.798

ArF and/or KrF excimer laser irradiation on frozen nitrogen, formed on a Nb target using a refrigerator, has been performed. This technique makes it possible to effectively enhance the photo excited reaction between a laser beam and nitrogen because of the high density of nitrogen. The excitation and/or dissociation of nitrogen are examined using a spectroscope and a mass-spectrometer. As a result, the frozen nitrogen was excited via multiphoton processes and emissions of the transitions N 2 ( A 3 Σ u + )→ N 2 ( X 1 Σ g + ), N 2 ( C 3 Π u )→ N 2 ( B 3 Π g ) and N( 2 D )→ N( 4 S ) were observed. Furthermore, it was clarified that both nitrogen molecules and atoms were emitted from the frozen nitrogen effectively by co-ablation with Nb target ablation at a higher laser irradiation energy density.