Coaxial Impact-Collision Ion Scattering Spectroscopy and Time-of-Flight Elastic Recoil Detection Analysis for In Situ Monitoring of Surface Processes in Gas Phase Atmosphere

Based on conventional coaxial impact-collision ion scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA), we have developed a novel ion scattering and recoiling spectrometer equipped with a differential pumping system for in situ monitoring of surface proc...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 40; no. 6A; p. L576
Main Authors Katayama, Mitsuhiro, Fujino, Toshiaki, Yamazaki, Yujin, Inoue, Shin-ichi, Ryu, Jeong-Tak, Oura, Kenjiro
Format Journal Article
LanguageEnglish
Published 01.06.2001
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Summary:Based on conventional coaxial impact-collision ion scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA), we have developed a novel ion scattering and recoiling spectrometer equipped with a differential pumping system for in situ monitoring of surface processes in gas phase atmosphere in the pressure regime up to 10 -4 Torr. In order to demonstrate the performance of this apparatus, we have applied it to real-time monitoring of Ge thin film growth on a Si(001) surface in atomic hydrogen (H) atmosphere. The morphology of Ge thin films and H coverage on the growth front during the growth in H atmosphere were successfully observed.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.40.L576