Tetrahedral Amorphous Carbon Films By Filtered Cathodic Vacuum-Arc Deposition For Air-Bearing-Surface Overcoat

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 42; no. Part 1, No. 5A; pp. 2824 - 2828
Main Authors Inaba, Hiroshi, Furusawa, Kenji, Hirano, Shinya, Sasaki, Shinji, Todoroki, Satoru, Yamasaka, Minoru, Endou, Masayoshi
Format Journal Article
LanguageEnglish
Published 2003
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.2824