Preparation of Position-Controlled Crystal-Silicon Island Arrays by Means of Excimer-Laser Annealing

• Published in: Japanese Journal of Applied Physics Vol. 37; no. 10R; p. 5474
• Main Authors: Chang-Ho Oh, Chang-Ho Oh, Masakiyo Matsumura, Masakiyo Matsumura
• Format: Journal Article
• Language: English
• Published: 01.10.1998

Two-dimensionally aligned and ultralarge Si grains were grown on a glassy substrate by phase-modulated excimer-laser annealing, for the first time. Grains as large as 7 µm were grown at predetermined positions at 500°C, and were expected to be aligned with less than 30 µm pitch. Serious effects of t...