Structure, Composition, and Properties of Arc PVD Mo–Si–Al–Ti–Ni–N Coatings
Using an arc physical vapor deposition process, we have produced nanostructured Mo–Si–Al–Ti–Ni–N coatings with a multilayer architecture formed by Mo 2 N, AlN–Si 3 N 4 , and TiN–Ni and a crystallite size on the order of 6–10 nm. We have studied the physicomechanical properties of the coatings and th...
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Published in | Inorganic materials Vol. 54; no. 5; pp. 437 - 445 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.05.2018
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | Using an arc physical vapor deposition process, we have produced nanostructured Mo–Si–Al–Ti–Ni–N coatings with a multilayer architecture formed by Mo
2
N, AlN–Si
3
N
4
, and TiN–Ni and a crystallite size on the order of 6–10 nm. We have studied the physicomechanical properties of the coatings and their functional characteristics: wear resistance, adhesion to their substrates, and heat resistance. According to high-temperature (550°C) wear testing and air oxidation (600°C) results, the coatings studied here are wearand heat-resistant under appropriate temperature conditions. Their properties are compared to those of Mo–Si–Al–N coatings. |
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ISSN: | 0020-1685 1608-3172 |
DOI: | 10.1134/S0020168518050023 |