A magnetostrictive mini actuator for long-stroke positioning with nanometer resolution

• Published in: Journal of micromechanics and microengineering Vol. 16; no. 7; pp. 1227 - 1232
• Main Authors: Yang, B T, Bonis, M, Tao, H, Prelle, C, Lamarque, F
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.07.2006; Institute of Physics
• Subjects: Applied sciences; Exact sciences and technology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Physics; Precision engineering, watch making; Transducers; Positioning; Worm gear; Magnetostriction; Prestress; Position control; Microactuators; Quasi static theory; Giant magnetoresistance; Large displacement; Experimental study; Magnetostrictive device; Modeling; Nanometer scale; Static conditions; Linear motor; Non linear effect; Motion control; Magnetoelastic effect; Actuator
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/16/7/016

Giant magnetostrictive material can generate about 1600 ppm strain, and with the solid-state deformation principle it has the potential to render high force and precise displacement with a small volume, which makes it suitable to realize efficient miniature actuators. We have developed an inchworm linear motion mini actuator (50 X 30 X 30 mm) which is required to position an object over a range of some millimeters with nanometer resolution. An analytical model has been established for step displacement in quasi-static conditions, depending nonlinearly on both the magnetic excitation and the mechanical prestress exerted on the rod. Tests with the actuator prototype show that it can move on a flat surface with a velocity of 97.2 mum s-1 and a positioning resolution of up to 4 nm.