A magnetostrictive mini actuator for long-stroke positioning with nanometer resolution
Giant magnetostrictive material can generate about 1600 ppm strain, and with the solid-state deformation principle it has the potential to render high force and precise displacement with a small volume, which makes it suitable to realize efficient miniature actuators. We have developed an inchworm l...
Saved in:
Published in | Journal of micromechanics and microengineering Vol. 16; no. 7; pp. 1227 - 1232 |
---|---|
Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.07.2006
Institute of Physics |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Giant magnetostrictive material can generate about 1600 ppm strain, and with the solid-state deformation principle it has the potential to render high force and precise displacement with a small volume, which makes it suitable to realize efficient miniature actuators. We have developed an inchworm linear motion mini actuator (50 X 30 X 30 mm) which is required to position an object over a range of some millimeters with nanometer resolution. An analytical model has been established for step displacement in quasi-static conditions, depending nonlinearly on both the magnetic excitation and the mechanical prestress exerted on the rod. Tests with the actuator prototype show that it can move on a flat surface with a velocity of 97.2 mum s-1 and a positioning resolution of up to 4 nm. |
---|---|
Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0960-1317 1361-6439 |
DOI: | 10.1088/0960-1317/16/7/016 |