Fabrication of free-standing porous silicon microstructures

• Published in: Journal of micromechanics and microengineering Vol. 17; no. 7; pp. S164 - S167
• Main Authors: Garel, O, Breluzeau, C, Dufour-Gergam, E, Bosseboeuf, A, Belier, B, Mathet, V, Verjus, F
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Bristol IOP Publishing 01.07.2007; Institute of Physics
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Suspended structure; Q factor; Porous membrane; Silicon; Chemical sensor; Porous material; Microelectromechanical device; Cantilever beam
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/17/7/S13

The high specific surface of porous silicon and its high reactivity makes this material a good candidate for chemical sensors based on electrical or electromechanical devices. In this paper, several processes are presented to realize free-standing porous silicon microstructures (membranes and cantilever beams). Good resonance quality factors were measured (Q = 110 and 760 respectively) demonstrating that porous silicon is a suitable material for resonant chemical sensors.