Highly sensitive and selective H2S gas sensor from r.f. sputtered SnO2 thin film

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Bibliographic Details
Published inSensors and actuators. B, Chemical Vol. 25; no. 1-3; pp. 433 - 437
Main Authors MOCHIDA, T, KIKUCHI, K, KONDO, T, UENO, H, MATSUURA, Y
Format Conference Proceeding Journal Article
LanguageEnglish
Published Lausanne Elsevier 01.04.1995
Amsterdam
New York, NY
Subjects
Analytical chemistry
Chemistry
Exact sciences and technology
General equipment and techniques
General, instrumentation
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Hydrogen Sulfides
Stability
Selectivity
Chemical sensor
Radiofrequency
Coatings
Optimization
Thin film
Sensitivity
Response time
Tin oxide
Reactive sputtering
Microstructure
Gas detector
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More Information
ISSN:0925-4005
1873-3077
DOI:10.1016/0925-4005(95)85098-8