Two-modulator generalized ellipsometry: experiment and calibration
A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mue...
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Published in | Applied optics (2004) Vol. 36; no. 31; p. 8184 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
United States
01.11.1997
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Online Access | Get more information |
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Summary: | A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mueller-Jones matrix, only a single measurement is needed. Only two calibration steps are needed to determine the fundamental operating parameters of the instrument. A reflection measurement from silicon is presented as an example, which illustrates that the elements of the Mueller-Jones matrix can be measured to an accuracy of ~0.1-0.2%. |
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ISSN: | 1559-128X |
DOI: | 10.1364/ao.36.008184 |