RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 31; no. 11; pp. 114001 - 114013
Main Authors Lu, Ruochen, Gong, Songbin
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.11.2021
Subjects
acoustic devices
electromechanical coupling
frequency scaling
lithium niobate
piezoelectric devices
quality factor
thin-film devices
Online AccessGet full text
ISSN0960-1317
1361-6439
DOI10.1088/1361-6439/ac288f

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Author Gong, Songbin
Lu, Ruochen
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– sequence: 2
  givenname: Songbin
  surname: Gong
  fullname: Gong, Songbin
  organization: University of Illinois at Urbana-Champaign Department of Electrical and Computer Engineering, Champaign, Illinois, United States of America
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SubjectTerms acoustic devices
electromechanical coupling
frequency scaling
lithium niobate
piezoelectric devices
quality factor
thin-film devices
Title RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook
URI https://iopscience.iop.org/article/10.1088/1361-6439/ac288f
Volume 31
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