RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

Saved in:
Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 31; no. 11; pp. 114001 - 114013
Main Authors Lu, Ruochen, Gong, Songbin
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.11.2021
Subjects
acoustic devices
electromechanical coupling
frequency scaling
lithium niobate
piezoelectric devices
quality factor
thin-film devices
Online AccessGet full text

Cover

More Information
Bibliography:JMM-105424.R1
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/ac288f