Cost effective realization of nanoscaled interdigitated electrodes

• Published in: Journal of micromechanics and microengineering Vol. 10; no. 3; pp. N1 - N5
• Main Authors: Gerwen, P Van, Laureyn, W, Campitelli, A, Jacobs, P, Detemple, P, Baert, K, Sansen, W, Mertens, R
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.09.2000; Institute of Physics
• Subjects: Applied sciences; Biological and medical sciences; Biosensors; Biotechnology; Cost effectiveness; Electronics; Evaporation; Exact sciences and technology; Fundamental and applied biological sciences. Psychology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Lithography, masks and pattern transfer; Methods. Procedures. Technologies; Microelectronic fabrication (materials and surfaces technology); Nanostructured materials; Photolithography; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Substrates; Ultraviolet radiation; Various methods and equipments; Electrodes; Patterning; Ultraviolet radiation; Electron beam lithography; Lithography; Measurement sensor; Injection molding; Plastic packaging; Nanostructures; Biosensors; Interdigital configuration
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/10/3/401

Nanoscaled interdigitated electrodes (IDEs) are being developed for the realization of miniaturized and highly-sensitive affinity biosensors. Until now, nanoscaled IDEs have been realized on silicon wafers using deep UV lithography or e-beam patterning. However, for many applications in the biochemical field there is a strong need for cheap and/or disposable sensor devices. Therefore, a new, cost effective fabrication method for nanoscaled IDEs, which can also be applied on cheap, micro-moulded plastic substrates, has been developed. The method is based on the directionality of a vacuum evaporation process and omits expensive lithography steps completely. The feasibility of this electrode deposition technique has been proven by realizing IDEs on silicon substrates. Future work is focused on the realization of IDEs on injection moulded plastic substrates.