Effects of different divalent cations in mTi-based codopants (m = Mg or Zn) on the piezoelectric properties of AlN thin films

• Published in: Ceramics international Vol. 46; no. 3; pp. 4015 - 4019
• Main Authors: Anggraini, Sri Ayu, Uehara, Masato, Hirata, Kenji, Yamada, Hiroshi, Akiyama, Morito
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 15.02.2020
• Subjects: Aluminum nitride; MgTi codopants; Piezoelectricity; Sputtering; Thin films; ZnTi codopants; Thin films; Piezoelectricity; MgTi codopants; ZnTi codopants; Sputtering; Aluminum nitride

The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher pi...