Effects of different divalent cations in mTi-based codopants (m = Mg or Zn) on the piezoelectric properties of AlN thin films

The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher pi...

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Bibliographic Details
Published inCeramics international Vol. 46; no. 3; pp. 4015 - 4019
Main Authors Anggraini, Sri Ayu, Uehara, Masato, Hirata, Kenji, Yamada, Hiroshi, Akiyama, Morito
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 15.02.2020
Subjects
Aluminum nitride
MgTi codopants
Piezoelectricity
Sputtering
Thin films
ZnTi codopants
Thin films
Piezoelectricity
MgTi codopants
ZnTi codopants
Sputtering
Aluminum nitride
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Summary:The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher piezoelectric response (d33). In this study, Mg was replaced by Zn as the divalent cation in a single dopant or codopant and the effects on the piezoelectric responses were investigated. The substitution of Mg with Zn in a single dopant or codopant affected the crystallinity, composition, and eventually d33 of the thin film.
ISSN:0272-8842
1873-3956
DOI:10.1016/j.ceramint.2019.10.041