Effects of different divalent cations in mTi-based codopants (m = Mg or Zn) on the piezoelectric properties of AlN thin films
The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher pi...
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| Published in | Ceramics international Vol. 46; no. 3; pp. 4015 - 4019 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
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Elsevier Ltd
15.02.2020
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| Abstract | The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher piezoelectric response (d33). In this study, Mg was replaced by Zn as the divalent cation in a single dopant or codopant and the effects on the piezoelectric responses were investigated. The substitution of Mg with Zn in a single dopant or codopant affected the crystallinity, composition, and eventually d33 of the thin film. |
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| AbstractList | The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher piezoelectric response (d33). In this study, Mg was replaced by Zn as the divalent cation in a single dopant or codopant and the effects on the piezoelectric responses were investigated. The substitution of Mg with Zn in a single dopant or codopant affected the crystallinity, composition, and eventually d33 of the thin film. |
| Author | Akiyama, Morito Anggraini, Sri Ayu Yamada, Hiroshi Hirata, Kenji Uehara, Masato |
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| Keywords | Thin films Piezoelectricity MgTi codopants ZnTi codopants Sputtering Aluminum nitride |
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| Title | Effects of different divalent cations in mTi-based codopants (m = Mg or Zn) on the piezoelectric properties of AlN thin films |
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