Experimental investigations on ultrashort laser ablation for micro and nanomachining of materials

With the advantage of ultrashort pulse width and ultrahigh peak power, subpicosecond lasers can provide extremely precise machining, and therefore has been widely applied in micro and nanoscale manufacturing. We present the results of the experimental parametric study on efficiency, accuracy and qua...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1186; no. 1; pp. 12028 - 12033
Main Authors Garasz, Katarzyna, Kocik, Marek, Petrov, Todor
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.03.2019
Subjects
Femtosecond pulsed lasers
Laser ablation
Laser machining
Lasers
Micromachining
Pulse duration
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Summary:With the advantage of ultrashort pulse width and ultrahigh peak power, subpicosecond lasers can provide extremely precise machining, and therefore has been widely applied in micro and nanoscale manufacturing. We present the results of the experimental parametric study on efficiency, accuracy and quality of subpicosecond laser micromachining of materials, that have a potential for application in innovative devices and technologies. The laser micromachining process was performed with a Yb:KYW subpicosecond laser and a Ti:S femtosecond laser. The study contains a comparison between the two methods, and results analysis using advanced metrology techniques, such as 3D microscopy.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1186/1/012028