Sol–gel derived PMN–PT thick films for high frequency ultrasound linear array applications

• Published in: Ceramics international Vol. 39; no. 8; pp. 8709 - 8714
• Main Authors: Zhu, B.P., Wu, D.W., Zhang, Y., Ou-Yang, J., Chen, S., Yang, X.F.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.12.2013
• Subjects: Arrays; Dielectric loss; Etching; High frequency; Infiltration; Kerfless linear array; Linear arrays; PMN–PT thick film; Sol gel process; Thick films; Kerfless linear array; High frequency; PMN–PT thick film
• ISSN: 0272-8842; 1873-3956
• DOI: 10.1016/j.ceramint.2013.04.054

A 12-µm PMN–PT [0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3] thick film was produced by alternate spin-coating of a ceramic powder/sol–gel composite and infiltration of the sol–gel. Using this technique, a high quality PMN–PT thick film was obtained, showing a permittivity εr of ~3300 and dielectric loss factor of ~0.02 at 1kHz. Photolithographic and wet etching techniques were used to fabricate a 32-element linear array from the film. The completed array showed a center frequency of approximately 110MHz and a bandwidth of 60% at −6dB without a matching layer. The performance of the kerfless array was studied and compared to a kerfed array simulated with finite element analysis.