A compact time-of-flight mass spectrometer for ion source characterization

A compact time-of-flight mass spectrometer with overall dimension of about 413 × 250 × 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The m...

Full description

Saved in:
Bibliographic Details
Published inReview of scientific instruments Vol. 86; no. 3; p. 035107
Main Authors Chen, L, Wan, X, Jin, D Z, Tan, X H, Huang, Z X, Tan, G B
Format Journal Article
LanguageEnglish
Published United States 01.03.2015
Online AccessGet more information

Cover

More Information
Summary:A compact time-of-flight mass spectrometer with overall dimension of about 413 × 250 × 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters.
ISSN:1089-7623
DOI:10.1063/1.4914588