Modeling of low pressure plasma sources for microelectronics fabrication

• Published in: Journal of physics. D, Applied physics Vol. 50; no. 42; pp. 424001 - 424013
• Main Authors: Agarwal, Ankur, Bera, Kallol, Kenney, Jason, Likhanskii, Alexandre, Rauf, Shahid
• Format: Journal Article
• Language: English
• Published: IOP Publishing 25.10.2017
• Subjects: 3D plasma modeling; plasma deposition; plasma etch; plasma ion implantation; plasma modeling; semiconductor manufacturing
• ISSN: 0022-3727; 1361-6463
• DOI: 10.1088/1361-6463/aa88f0

Chemically reactive plasmas operating in the 1 mTorr-10 Torr pressure range are widely used for thin film processing in the semiconductor industry. Plasma modeling has come to play an important role in the design of these plasma processing systems. A number of 3-dimensional (3D) fluid and hybrid plasma modeling examples are used to illustrate the role of computational investigations in design of plasma processing hardware for applications such as ion implantation, deposition, and etching. A model for a rectangular inductively coupled plasma (ICP) source is described, which is employed as an ion source for ion implantation. It is shown that gas pressure strongly influences ion flux uniformity, which is determined by the balance between the location of plasma production and diffusion. The effect of chamber dimensions on plasma uniformity in a rectangular capacitively coupled plasma (CCP) is examined using an electromagnetic plasma model. Due to high pressure and small gap in this system, plasma uniformity is found to be primarily determined by the electric field profile in the sheath/pre-sheath region. A 3D model is utilized to investigate the confinement properties of a mesh in a cylindrical CCP. Results highlight the role of hole topology and size on the formation of localized hot-spots. A 3D electromagnetic plasma model for a cylindrical ICP is used to study inductive versus capacitive power coupling and how placement of ground return wires influences it. Finally, a 3D hybrid plasma model for an electron beam generated magnetized plasma is used to understand the role of reactor geometry on plasma uniformity in the presence of E  ×  B drift.