Pulse Laser Sulfur-Hyperdoping of Germanium and High Quantum Efficiency Photodiodes
Germanium was successfully hyperdoped with sulfur by means of nanosecond pulse laser and SF6 gas. A photodiode was fabricated based on sulfur-hyperdoped germanium. Rectifying current-voltage characteristics were observed for the device. The sulfur-hyperdoped germanium photodiode showed an internal q...
Saved in:
Published in | IEEE photonics journal Vol. 8; no. 5; pp. 1 - 10 |
---|---|
Main Authors | , |
Format | Journal Article |
Language | English |
Published |
IEEE
01.10.2016
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Germanium was successfully hyperdoped with sulfur by means of nanosecond pulse laser and SF6 gas. A photodiode was fabricated based on sulfur-hyperdoped germanium. Rectifying current-voltage characteristics were observed for the device. The sulfur-hyperdoped germanium photodiode showed an internal quantum efficiency close to 150% from visible to near infrared and increased to 275% for the ultraviolet region. The -3 dB bandwidth was measured to be 20 MHz. Sulfur was demonstrated to be an effective deep level dopant for realizing high-performance germanium photodiodes. |
---|---|
ISSN: | 1943-0655 1943-0655 1943-0647 |
DOI: | 10.1109/JPHOT.2016.2611444 |