Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

• Published in: Journal of electronic materials Vol. 37; no. 12; pp. 1811 - 1820
• Main Authors: Keating, A.J., Antoszewski, J., Silva, K.K.M.B.D., Winchester, K.J., Nguyen, T., Dell, J.M., Musca, C.A., Faraone, L., Mitra, P., Beck, J.D., Skokan, M.R., Robinson, J.E.
• Format: Journal Article
• Language: English
• Published: Boston Springer US 01.12.2008; Springer; Springer Nature B.V
• Subjects: Applied sciences; Characterization and Evaluation of Materials; Chemistry and Materials Science; Electronics; Electronics and Microelectronics; Exact sciences and technology; Fabry-Perot interferometers; General equipment and techniques; Infrared imaging systems; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Materials Science; Micro- and nanoelectromechanical devices (mems/nems); Microelectromechanical systems; Optical and Electronic Materials; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Solid State Physics; Spectrum analysis; Fabry–Pérot resonators; microelectromechanical devices; infrared image sensors; infrared detectors; photoconducting materials; infrared spectroscopy; Resonator; Optical constant; Infrared detector; Mechanical properties; Photoconductor materials; Switching; Infrared spectrometry; Microelectronic fabrication; Fabry-Pérot resonators; Line width; Fabry Pérot interferometer; Analytical method; Stress effects; Distributed Bragg reflectors; Mirror; Microelectromechanical device
• ISSN: 0361-5235; 1543-186X
• DOI: 10.1007/s11664-008-0526-0

Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry–Pérot filter and a Hg x Cd 1– x Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5  μ m to 2.6  μ m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40  μ s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry–Pérot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry–Pérot mirror due to stress gradients is identified as the dominant source of linewidth broadening.