Implementation of sub-Rayleigh-resolution lithography using an N -photon absorber
A nonlinear optical, phase-shifted-grating method for improving the resolution of feature sizes is implemented experimentally using an N-photon lithographic material. For the recording medium, we used poly(methyl-methacrylate) (PMMA), which is a UV lithographic material that can be excited by multi-...
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Published in | Journal of modern optics Vol. 53; no. 16-17; pp. 2271 - 2277 |
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Main Authors | , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
London
Taylor & Francis Group
10.11.2006
Taylor & Francis |
Subjects | |
Online Access | Get full text |
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Summary: | A nonlinear optical, phase-shifted-grating method for improving the resolution of feature sizes is implemented experimentally using an N-photon lithographic material. For the recording medium, we used poly(methyl-methacrylate) (PMMA), which is a UV lithographic material that can be excited by multi-photon absorption in the visible region. We achieved a two-fold enhancement of the resolution over the standard Rayleigh limit of half of the wavelength. |
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ISSN: | 0950-0340 1362-3044 |
DOI: | 10.1080/09500340600895656 |