The Effect of Oxygen Partial Pressure on Marangoni-Flow-Induced Dopant Striations in Floating-Zone Silicon Crystals

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 42; no. Part 1, No. 10; pp. 6243 - 6247
Main Authors Sumiji, Masanobu, Azami, Takeshi, Hibiya, Taketoshi
Format Journal Article
LanguageEnglish
Published 01.10.2003
Online AccessGet full text

Cover

More Information
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.6243