Low voltage field emission of single Cu nanowire in air with nanoscale gaps for vacuum electronics

• Published in: Micro & nano letters Vol. 12; no. 11; pp. 897 - 900
• Main Authors: Liu, Meng, Yang, Yang, Li, Tie, Wang, Yuelin
• Format: Journal Article
• Language: English
• Published: Stevenage The Institution of Engineering and Technology 01.11.2017; John Wiley & Sons, Inc
• Subjects: Anodes; bias voltages; Cathodes; copper; Emission analysis; emission current; Emitters; Field effect transistors; Field emission; focused ion beam etching; focused ion beam technology; Ion beams; Low voltage; low voltage field emission; nanoscale cathode‐anode distances; nanoscale gaps; Nanowires; Semiconductor devices; single Cu emitter; single Cu nanowire; Special Issue: Selected Papers from The 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017); sputter etching; turn‐on voltage; vacuum electronics; nanoscale gaps; cathodes; single Cu emitter; sputter etching; low voltage field emission; turn-on voltage; field emission; single Cu nanowire; bias voltages; focused ion beam technology; vacuum electronics; nanoscale cathode-anode distances; focused ion beam etching; Cu; nanowires; emission current; copper
• ISSN: 1750-0443; 1750-0443
• DOI: 10.1049/mnl.2017.0411

Field emission applications to date including displays have featured electrode gaps in the micron scale or even larger. Devices such as vacuum field effect transistors demand smaller gaps for improved performance and continued scaling. The present work investigates nanoscale cathode–anode distances and evaluated field emission characteristics using a single Cu emitter. The gap was systematically varied between 20 and 80 nm with the aid of focused ion beam etching. Field emission was achieved at bias voltages below 5 V under atmospheric conditions with a 20 nm gap between the cathode and anode. The turn-on voltage was 1.75 V and the maximum current reached 32.5 nA at 5 V. The emission current is dependent on the cathode–anode distance and decreases exponentially with increasing distance. The nanoscale gap allows lower drive voltages than in previous studies while providing large emission currents for a single emitter.