Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation
In this work, the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV/soft X-ray reflectometer (EXRR) results showed that, after proton irradiation, the reflect...
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Published in | Science China. Physics, mechanics & astronomy Vol. 55; no. 11; pp. 2194 - 2198 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Heidelberg
SP Science China Press
01.11.2012
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | In this work, the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV/soft X-ray reflectometer (EXRR) results showed that, after proton irradiation, the reflectivity of the Mo/Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm, as compared with those before proton irradiation. High-resolution transmission electron microscopy (HRTEM) observations revealed the presence of MoSi2, Mo3Si and Mo5Si3 in Mo-on-Si interlayers before irradiation. The preferred orientation such as MoSi2 with (101) texture and Mo5Si3 with (310) texture was formed in Mo-on-Si interlayers after proton irradiation, which led to the increase of thickness in the interlayers. It is suggested that the changes of microstructures in Mo/Si multilayers under proton irradiation could cause optical properties degradation. |
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Bibliography: | 11-5000/N multilayer ; microstructure ; irradiation damage ; optical properties In this work, the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV/soft X-ray reflectometer (EXRR) results showed that, after proton irradiation, the reflectivity of the Mo/Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm, as compared with those before proton irradiation. High-resolution transmission electron microscopy (HRTEM) observations revealed the presence of MoSi2, Mo3Si and Mo5Si3 in Mo-on-Si interlayers before irradiation. The preferred orientation such as MoSi2 with (101) texture and Mo5Si3 with (310) texture was formed in Mo-on-Si interlayers after proton irradiation, which led to the increase of thickness in the interlayers. It is suggested that the changes of microstructures in Mo/Si multilayers under proton irradiation could cause optical properties degradation. LV Peng, WANG XiaoDong, LIU Hai, ZHANG ZaiQiang, GUAN JinTong, CHEN Bo, GUAN QingFeng(1 School of Materials Science & Engineering, Jiangsu University, Zhenjiang 212013, China; 2 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 3 Space Materials and Environment Engineering Laboratory, Harbin Institute of Technology, Harbin 150001, China; 4 Faculty of Science, Jiangsu University, Zhenjiang 212013, China) ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 1674-7348 1869-1927 |
DOI: | 10.1007/s11433-012-4908-1 |